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Excimer Lasers
MLI ArF Excimer Laser 193nm
MLase excimer lasers are compact, high-stability systems with pulse energies up to 16mJ and repetition rates to 1000 Hz
| Wavelength | Max Pulse energy | Pulse width | Rep-rate |
| 193nm | 12 mJ | 5-10 ns | 200 Hz |
| 193nm | 12 mJ | 5-10 ns | 500 Hz |
| 193nm | 12 mJ | 5-10 ns | 1000 Hz |
MLI KrF Excimer Laser 248nm
MLase excimer lasers are compact, high-stability systems with pulse energies up to 16mJ and repetition rates to 1000 Hz
| Wavelength | Max Pulse energy | Pulse width | Rep-rate |
| 248nm | 16 mJ | 5-10 ns | 200 Hz |
| 248nm | 16 mJ | 5-10 ns | 500 Hz |
| 248nm | 16 mJ | 5-10 ns | 1000 Hz |
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